Download MEMS Mexico Network, 2003

Univ. Autónoma de Ciudad Juárez
MEMS in Mexico, thanks to Frank
Prepared by:
Jose Mireles Jr.
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Jose Mireles Jr., Systems Workshop on Adaptive & Networks, SWAN 06, 8-9 December 2006
Outline
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MEMS in Mexico
MEMS packaging in Juarez (CICTA - UACJ)
Projects at CICTA
Conclusions
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Jose Mireles Jr., Systems Workshop on Adaptive & Networks, SWAN 06, 8-9 December 2006
MEMS Mexico Network, 2003
UACJ
ITESM-MTY
ITESI
UV
INAOE
U de G
UPAEP
CINVESTAVGDL
UNAM
IPN
IIE
Innovation Laboratories in MEMS
Design
Caracterization
MEMS Network
UNAM BioMEMS
Telecomun
Fabrication
Packaging
INAOE BioMEMS
UACJ Automotriz
BioMEMS
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Jose Mireles Jr., Systems Workshop on Adaptive & Networks, SWAN 06, 8-9 December 2006
Elementos de la Red de MEMS en México
SECTORES DE
OPORTUNIDAD
GRUPOS DE
COLABORACIÒN
USA
European
union
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CA
NA
DÁ
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Centro America
CENATEC
Suframa,
Brasil
Argentina
Costa
Rica
Red de
Centros de
Diseño MEMS
Laboratorios de
InnovaciónMEMS
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Automotriz:
DELPHI
Visteon
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Industrial
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Salud
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Cementos
Clusters de
MEMS: Puebla,
Paso del Norte
U de los Andes,
Colombia
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Jose Mireles Jr., Systems Workshop on Adaptive & Networks, SWAN 06, 8-9 December 2006
MEMS Packaging
at UACJ
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Research Center of Applied Science and Technology
“Centro de Investigación de Ciencia y Tecnología Aplicada” (CICTA)
Universidad Autónoma de Ciudad Juárez
UACJ, Instituto de Ingeniería y Tecnología
Septiembre 2006
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Jose Mireles Jr., Systems Workshop on Adaptive & Networks, SWAN 06, 8-9 December 2006
Current infrastructure
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Offices for researchers
Clean room 100, 1000, 10000
Assembly tools
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Micropositioners
Nanopositioners
Vision
Equipo para pruebas y encapsulado
145 m2
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Jose Mireles Jr., Systems Workshop on Adaptive & Networks, SWAN 06, 8-9 December 2006
MEMS Packaging equipment at UACJ
Suss MicroTec
FC150
BA6
Flip chip bonder
Die-wafer Bonder
Optoelectronic assy
Photonics assy
Aligner
for 2” – 6” wafers
SB6e
Wafer-wafer Bonder
Anodic Bonder
Eutectic Bonder
Fusion Bonder
Thermo compression
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Jose Mireles Jr., Systems Workshop on Adaptive & Networks, SWAN 06, 8-9 December 2006
Not only MEMS
Advanced characterization at UACJ
JEOL JSM-7000F Field Emission Analytical Scanning Electron Microscope
Major Specifications
Resolution
1.2nm (30kV) , 1.5 nm (15kV),
3.0 nm (1kV) imaging performance
3.0 nm (15 kV, 10 mm, 5nA) for high
resolution analytical performance
Accelerating Voltage
0.5 to 30 kV
Electron Source
Schottky Field Emission Gun
Probe Current
<1 pA to >200nA
Magnification
x10 to 500,000
Image Modes
Secondary Electron Image
Backscattered Electron Image
(Composition, Topography)
Forward Scatter detector (EBSD)
Cathodoluminesence
Accessory Ports
11 ports with optimized geometry for
analytical detectors
Specimen Stage
Eucentric goniometer (5 axis motorized)
X=70mm, Y=50mm, Z=3 to 41 mm,
R=360° (endless)
T=-5 to 70°
Image Store
Up to 2560 x 2048 pixels
Analytical Working
Distance
10mm EDS
15mm WDS
Thermal, 30KV
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Jose Mireles Jr., Systems Workshop on Adaptive & Networks, SWAN 06, 8-9 December 2006
Disco Wafer Dicing
Wire bonder K&S 4524AD
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Jose Mireles Jr., Systems Workshop on Adaptive & Networks, SWAN 06, 8-9 December 2006
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Jose Mireles Jr., Systems Workshop on Adaptive & Networks, SWAN 06, 8-9 December 2006
MEMS Projects at
UACJ
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MEMS Packaging cluster Paso del Norte
UNM-Gallup
Los Alamos National Labs
U. of New Mexico
TVI Community College
Sandia National Labs
New Mexico Tech.
White Sands Missile Range
New Mexico State U.
Bi-National Sustainability Lab
UT-El Paso
El Paso Community College
FUMEC
U. Autonoma de Cd. Juarez, Mexico
Delphi Automotive
Tec de Monterey, Cd. Juarez
CIMAV Advanced Materials Lab, Mexico
Jose Mireles Jr., Systems Workshop on Adaptive & Networks, SWAN 06, 8-9 December 2006
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Team Technologies, new company in Juarez
NDA
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Jose Mireles Jr., Systems Workshop on Adaptive & Networks, SWAN 06, 8-9 December 2006
Development of Flow sensors using Optical Fibers
Patent pending
Capacitance vs Reynolds
y = 0.0157x + 2.48
R2 = 0.9832
2.9
Microfarads
2.85
2.8
2.75
2.7
2.65
2.6
2.55
2.5
0.00
5.00
10.00
15.00
20.00
25.00
Reynolds
COMS-02
Jose Mireles Jr., Systems Workshop on Adaptive & Networks, SWAN 06, 8-9 December 2006
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Sandia National Laboratories, investigation project
Micromirrors
Assembly, alignment
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Jose Mireles Jr., Systems Workshop on Adaptive & Networks, SWAN 06, 8-9 December 2006
Visteon, micromotor prototype project
Shape Memory Alloys
Magnetic Shape Memory
Wobble micromotors
Electromagnetic minimotors
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Jose Mireles Jr., Systems Workshop on Adaptive & Networks, SWAN 06, 8-9 December 2006
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Jose Mireles Jr., Systems Workshop on Adaptive & Networks, SWAN 06, 8-9 December 2006
Conclusions
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MEMS in Mexico
---> Thanks to Frank’s support / vision to
collaborate with FUMEC and CONACyT
FUMEC and government have federal
initiatives in high Technology on Mexico
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Jose Mireles Jr., Systems Workshop on Adaptive & Networks, SWAN 06, 8-9 December 2006
UACJ
ITESM-MTY
ITESI
UV
INAOE
U de G
UPAEP
CINVESTAVGDL
Projects:
Cluster, TT
Visteon
Sandia
Flow Sensor
Delphi
UNAM
IPN
IIE
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Jose Mireles Jr., Systems Workshop on Adaptive & Networks, SWAN 06, 8-9 December 2006
Controls laboratory at UACJ is next
Mechathronics Graduate program
 Joint PhD program w/ UTEP & NMSU
 UACJ Professors planning their PhDs
 Control’s meeting in Cancun?
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Jose Mireles Jr., Systems Workshop on Adaptive & Networks, SWAN 06, 8-9 December 2006