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R&D at IMB-CNM for future accelerators Haga clic para modificar el estilo de texto del patrón Manuel Lozano Giulio Pellegrini New Detectors R&D Meeting. Madrid, Dec 2009 CNM Clean Room expansion IFCA From 1000 to 1500 m2 New equipments ready with partial coverage for 15 cm (6’’) wafers We plan to do prototype runs of simple detectors in 6’’ in 2010 New ion implanter for 6’’ Manuel Lozano & Giulio Pellegrini I+D en el CNM/IMB para futuros aceleradores New Detectors R&D Meeting. Madrid, Dec 2009 Radiation Detector Group PhD Manuel Lozano Enric Cabruja Miguel Ullán Giulio Pellegrini Celeste Fleta David Quirion Marie Ruat Techniciens David Almansa Joaquín Rodríguez Manuel Lozano & Giulio Pellegrini PhD students Sergio Díez Juan Pablo Balbuena Daniela Bassignana Consuelo Guardiola Incorporation of a CPAN Engineer and a CSIC Electronic Technician Increased technical capacity Better position to afford GICSERV projects. I+D en el CNM/IMB para futuros aceleradores New Detectors R&D Meeting. Madrid, Dec 2009 R&D in radiation detectors at CNM Collaboration with other Spanish Groups IFIC IFAE IFCA Manuel Lozano & Giulio Pellegrini University Santiago de Compostela University Barcelona I+D en el CNM/IMB para futuros aceleradores New Detectors R&D Meeting. Madrid, Dec 2009 IFIC ALIBAVA detector readout system ALIBAVA Telescope Modules for ATLAS upgrade Manuel Lozano & Giulio Pellegrini I+D en el CNM/IMB para futuros aceleradores New Detectors R&D Meeting. Madrid, Dec 2009 ALIBAVA: A readout system for microstrip silicon sensors System finished 20 units already distributed 20 more units manufactured Upgrade for test beam telescope Upgrade for ethernet connectivity Manuel Lozano & Giulio Pellegrini I+D en el CNM/IMB para futuros aceleradores New Detectors R&D Meeting. Madrid, Dec 2009 Modules for ATLAS upgrade Study of radiation hardness of 0.25 µm SiGe BiCMOS technologies from IHP (Germany) Study of radiation hardness of LDMOS transistors for DC-DC converters. Understanding radiation degradation mechanisms Simulation and modeling of irradiated devices (transistors, detectors, etc) Embedded fanins for Endcap modules Dummies 1st IHP test chip 1st IBM test chip 2nd IHP test chip Manuel Lozano & Giulio Pellegrini I+D en el CNM/IMB para futuros aceleradores New Detectors R&D Meeting. Madrid, Dec 2009 IFAE Planar & 3D pixels for IBL and ATLAS upgrade Bump bonding packaging Manuel Lozano & Giulio Pellegrini I+D en el CNM/IMB para futuros aceleradores New Detectors R&D Meeting. Madrid, Dec 2009 Planar & 3D pixels for IBL and ATLAS upgrade CNM and IFAE are part of the ATLAS 3D Collaboration for the IBL (Insertable B-layer) of the ATLAS Pixel detector Collaboration being formed. MoU to be signed soon. Ref.: O. Rohne – Vertex 2009 Manuel Lozano & Giulio Pellegrini I+D en el CNM/IMB para futuros aceleradores New Detectors R&D Meeting. Madrid, Dec 2009 Bump Bonding In collaboration with IFAE Bump bonding already working Medipix and ATLAS pixels successfully bonded Efficiency in bump-bond contact > 99.5% (aim for 99.99% or better) Now working to increase yield and qualify the technology SET/Süss FC150 machine 1 micron placing accuracy Optimized reflow 2010 FPA Project to continue with bump bonding in FE-I4 chips with planar and 3D detectors Manuel Lozano & Giulio Pellegrini I+D en el CNM/IMB para futuros aceleradores New Detectors R&D Meeting. Madrid, Dec 2009 IFCA IR transparent detectors Thin strip detectors for CMS and ILC 3D pixels for CMS Manuel Lozano & Giulio Pellegrini I+D en el CNM/IMB para futuros aceleradores New Detectors R&D Meeting. Madrid, Dec 2009 IR transparent detectors In collaboration with IFCA Run almost finished 12 different detectors Common parameters: GICSERV SiO2 thickness map (wafer 2) Manuel Lozano & Giulio Pellegrini active area= 1.2x1.5 cm2 circular window in the back metal 256 readout strips with 1.5 cm length Strips with 3 µm Al width lines I+D en el CNM/IMB para futuros aceleradores New Detectors R&D Meeting. Madrid, Dec 2009 Thin devices GICSERV funded GICSERV Run already started Based on SOI wafers 100, 150 and 200 µm thick active devices Strip detectors with integrated fanins in double metal technology Grooves in silicon to integrate optical fibres to measure deformation Figure 2: Thinning of double-sided processed detectors. See text and ref. [6] for further details. Manuel Lozano & Giulio Pellegrini I+D en el CNM/IMB para futuros aceleradores New Detectors R&D Meeting. Madrid, Dec 2009 University Santiago de Compostela 3D pixels for LHCb Thin pixels Manuel Lozano & Giulio Pellegrini I+D en el CNM/IMB para futuros aceleradores New Detectors R&D Meeting. Madrid, Dec 2009 3D pixels for LHCb In collaboration with Glasgow University First 3D Medipix-like sensor bump bonded to Timepix chip Successfully tested in CERN test beam Pion beam GICSERV Individual pion tracks telescope Manuel Lozano & Giulio Pellegrini DUT I+D en el CNM/IMB para futuros aceleradores New Detectors R&D Meeting. Madrid, Dec 2009 Thin pixels for LHCb upgrade First tests of bump bonding of thin pixel detectors with Timepix chip. Detectors already manufactured at CNM Waiting for thinning and bump bonding GICSERV funded GICSERV Manuel Lozano & Giulio Pellegrini I+D en el CNM/IMB para futuros aceleradores New Detectors R&D Meeting. Madrid, Dec 2009 University of Barcelona Device simulation of Geiger mode APDs with Sentaurus AMS HV 0.35 µm CMOS technology. Difficulty to get technology parameters Some are deduced from technological kit, others are estimated indirectly. Manuel Lozano & Giulio Pellegrini I+D en el CNM/IMB para futuros aceleradores New Detectors R&D Meeting. Madrid, Dec 2009 Other technologies under development 3D detectors Double side strip detectors Stripixels Active edge and trenched detectors Ultrathin 3D detector Neutron detectors Avalanche Photodiodes Manuel Lozano & Giulio Pellegrini I+D en el CNM/IMB para futuros aceleradores New Detectors R&D Meeting. Madrid, Dec 2009 3D detector technology Second institute in the world (after Stanford) in developing a 3D detector technology Success with Medipix type pixel sensors Now we are designing of a new mask set for ATLAS pixel sensors Work done in the framework of RD50 collaboration. Collected Charge (e) Electron collecting strip detectors 25000 20000 15000 10000 5000 GICSERV 0 0 2 4 6 8 10 12 Fluence / 1015 (1 MeV neq cm-2) Partially funded GICSERV Manuel Lozano & Giulio Pellegrini Bias Voltage fixed at 150V for all irradiated samples Non-irradiated sample biased at 18V Detector’s ceramic based board temperature between -10°C to -15°C Measured with ALIBAVA system (25ns shaping time) I+D en el CNM/IMB para futuros aceleradores New Detectors R&D Meeting. Madrid, Dec 2009 Double side strip detectors Double side strip detectors developed for Monash University (Australia) Also developing double side packaging and wire bonding Future collaboration with Universidad de Huelva for nuclear physics Stripixels Combination of the concept of double side reading with 3D contacts GICSERV Better performace than classic stripixels Single side processing 2D position sensitivity 2N readout channels (instead of N2) Simulations and mask design ready Wafers to be processed Manuel Lozano & Giulio Pellegrini I+D en el CNM/IMB para futuros aceleradores New Detectors R&D Meeting. Madrid, Dec 2009 Active edge and trenched detectors Trenches used to reduce the dead area at the edge of the sensor Work started in collaboration with IFAE (Cristobal Padilla) Features: (also named edgeless, slim-edge, ...) Implanted edge side Backplane and edge in the same electrode Designed detectors: PAD Microstrips MediPix2 Circular Manuel Lozano & Giulio Pellegrini I+D en el CNM/IMB para futuros aceleradores New Detectors R&D Meeting. Madrid, Dec 2009 Ultrathin 3D detector Thin membrane 10 µm thick detector Virtually no entry window Used for tracking of light particles GICSERV 300um Etched backside Neutron detectors Planar detector Geant4 simulation Detector design and manufacturing Conversion layer deposition Used for dosimetry Perforated detector Manuel Lozano & Giulio Pellegrini I+D en el CNM/IMB para futuros aceleradores New Detectors R&D Meeting. Madrid, Dec 2009 Avalanche Photodiodes (APDs) Power Devices and Radiation Detectors Groups at IMB-CNM have started a new research line in optoelectronic silicon detectors. Cover the needs of the scientific community with custom made devices designed for specific applications We have finished electrical and technological simulations We are now designing the masks Next year we will process the devices. We plan to develop Linear mode APDs (to use with scintillators) Geiger mode APDs high energy tracking In the future, also SiPMs We are open for collaboration and feedback from other groups Manuel Lozano & Giulio Pellegrini Electric field in the avalanche zone P+ N+ N+ P+ N+ P+ p P+ I+D en el CNM/IMB para futuros aceleradores New Detectors R&D Meeting. Madrid, Dec 2009 GICSERV Easy access through the Spanish “Access to Large Facilities” Program: ICTS GICSERV New call now open until 15 January 2010 Average 70 applications, 50 accesses per call Projects related to radiation detectors: 2009: 7 projects approved (1 rejected) 3D medipix-type detectors; Stripixels; Thin pixel detectors; Thin strip detectors; Atlas pixels with slim edge; UBM for DEPFET bump bonding 2008: 5 projects approved 2007: 3 projects approved Big increase in radiation detector activity in CNM Clean Room GICSERV Progam working very satisfactory Manuel Lozano & Giulio Pellegrini I+D en el CNM/IMB para futuros aceleradores New Detectors R&D Meeting. Madrid, Dec 2009 Announcement Next RD50 meeting will be held in Barcelona (31st May, 1st & 2nd June 2010) http://cern.ch/rd50/ Manuel Lozano & Giulio Pellegrini I+D en el CNM/IMB para futuros aceleradores