Download ICTS: Sala Blanca Integrada de Micro y Nano - MANU-KET

ICTS: Sala Blanca Integrada de Micro y Nano Fabricación
SBCNM-CSIC
CNM‐CSIC: National Microelectronics Center
MINISTERIO
DE ECONOMIA
Y
COMPETITIVIDAD
D+T Microelectrónica, A.I.E.
SPANISH COUNCIL FOR SCIENTIFIC RESEARCH (CSIC)
NATIONAL MICROELECTRONICS CENTER (CNM)
MICROELECTRONICS INSTITUTE OF BARCELONA (IMB)
MICROELECTRONICS INSTITUTE OF MADRID (IMM)
LARGE SCALE FACILITY
Compound
semiconductors
(Integrated Clean Room)
Silicon‐based
micro and nano systems
MICROELECTRONICS INSTITUTE OF SEVILLA (IMSE)
Analog and mixed IC design
ICTS
Integrated Micro and Nano Fabrication
Clean Room
Main Clean Room
• 1,500 m2 Class 100‐10,000
• CMOS integrated circuits
• Microsystems technologies
• Nanolithography and nanofabrication
Back‐end Clean Room
• 40 m2 Class 1000
• Chip packaging
• High Density FlipChip
”
ICTS Access Program GICSERV
Call
Deadline
• Spanish Large Scale Facility since
1994 / EU access program as LSF
(2000-2003)
1
May 2006
2/3
Jan/Oct 2007
• Current Spanish access to large
facilities program since 2005
4
Mar 2008
51
5
Feb 2009
52
6
Feb 2010
55
7
Feb 2011
44
• Free access to (limited complexity)
projects at the facility, approved by
external evaluation committee
• Open to EU + assoc., extended to
Latin-American countries in 2010
Nº Projects
18
31/5
TOTAL
4/14
256
M&NT, MST, MEMS, NEMS… What are they? Microelectronics Fundamentals: The material
 Second element of crust
of the Earth after oxygen
 Silicon does not exist
free
 Normally in form of SiO2
6/14
Microelectronics Fundamentals: The technology. From the chip… to an instrument
Component or
subsystem
wafer
device
portable
benchtop
Micro and Nano
Integration
Miniaturised and cost‐effective instruments
Importance of the Micro and Nano Technologies for Europe
• Recent adoption of the European Strategy on Micro and Nanotechnologies, within the Digital Agenda of the EC.
• The EC adopts the Key Eanbling Techologies (KET) concept
• The R&D Infrastructures are basic for Bridging the Valley of Death
Micro and Nano Technologies:
Enabling for Societal Challenges
Health & wellness
Energy & environment
From ENIAC SRA:
Transport & mobility
Communication
9/14
Security & safety
Infotainment e-society
The Multiplier Effect of the
Micro and Nanotechnologies
Services
Electronics
6000 B $*
1400 B $
Semiconductors
300 B $
Telecom, Internet, Broadcast, AAL,…
Consumer, Medical, Energy, Transport, Security, Space,…
Cornestone of High Tech economy
Source: Future Horizon: IFS (2012 estimated*)
Advantages of Miniaturisation
• Portability: Small dimensions, Low weight
• Low cost: Planar technologies, Batch production
• Autonomy: Low power
• Ubiquity
• Reliability
• Smartness
11/14
NanoTechnology: A crossroad
Scale limit mastered by technology
Stone
Wood
Iron
Silicon
Nano size:
be closer to the
biological media to
improve specs
Biocomplicity:
Tissues
Cells
Genes
Proteins
DNA
CNT
Cells
APM
Atoms
Micro and Nano Technologies embedded in our lifes
13/14
ICTS SBCNM Main Pillars & R&D Activity
• Semiconductor Devices
• Power Devices
R&D
• Integrated Circuits and Systems • Sensors, Actuators and MEMS Technology Transfer
Training
• Nanoscale Devices and Actuators
• Lab‐on a chip, Polymer devices
R&D Value Chain at SBCNM
product
idea
IMB‐CNM Research Focus
MICRO & NANO INTEGRATED SYSTEMS
Energy
Bio
Key Enabling
technologies
Participation in the ATLAS detector at CERN
Sensors and Circuits:
Accelerometer
with self‐test system
Optomechanical
sensors
On‐chip immunodiagnostic methods for bacterial detection
Sensor needles for organ monitoring for transplantation
Direct methanol micro fuel cell (SU‐8 polymer) Integrated Circuits and Systems
• Low‐power RF circuits for wireless sensors
• Remote‐powered and body‐implantable
systems
• SoC & System electronics based on flexible platforms
RF integrated circuit
ARM – SoC
based platform
1.1V 300μW
Analog hearing‐aids
Implantable systems
for neural
recording/stimulation
Power modules integration and test
Nanoscale devices
• Advanced nanofabrication methods
• Novel nanometrology tools
• Singular properties of nanostructures
• Ultimate performance of nanoscale devices
CMOS‐integrated nanomechanical mass sensor
Large‐scale fabrication of CNT transistors
SFM control unit
Pie
zo
Driving
signal at
fres (2nd
mode)
bimorph
Lock-in 1
Lock-in 2
Modulation
signal at fmod
(1st mode)
CNT resonator
Si nanowires
Topography
Vibration
amplitude
RF source with
amplitude
modulation at
fmod=f (1st eigenmode)
CNT resonator
: La importancia del Factor de escala
Cuando se reducen las dimensiones:
las relaciones L/S y S/V aumentan
las estructuras térmicas se calientan y se enfrían más rápido
las estructuras se calientan con menos energía
las estructuras padecen menos estreses térmicos
las estructuras tienen menos inercia mecánica
la difusión en un fluido es más rápida
la mezcla en los microcanales es más difícil
el efecto de tensión superficial crece
El consumo energético es distinto
…
20/14
Spin‐Off
Micro4Ener
Wind
Waves, tides, …
Entrepreneurs Fund Award
MICRO4ENER: Microsystems for the detection of microorganismos
Otros Casos de Éxito (I)
Otros Casos de Éxito (II)
Otros Casos de Éxito (III)
Otros Casos de Éxito (IV)
Otros Casos de Éxito (VI)
Productos en pequeñas series (I)
Productos en pequeñas series (II)
Conclusiones:
• Qué pueden aportar las ICTS a la Industria ?:
• Investigación aplicada de calidad
• Realización de demostradores antes del paso a prototipado y de pre‐series
• Fabricación de pequeñas series en casos especiales
• Diseño interno y fabricación en Foundries externas, manteniendo la IP
• Facilidad de participación en grandes consorcios tecnológicos
• Formación en Alta Tecnología
• Alquiler de m2 de Sala limpia
• Asesoría para la instalación de Salas Blancas propias
Thanks for your attention!
+34 93 594 77 00
Carles Cané
Enric Cabruja
Luis Fonseca
Teresa González
Miguel Zabala
IMB‐CNM Director
IMB‐CNM Deputy Director IMB‐CNM Deputy Director
IMB‐CNM Administrative Manager
ICTS Manager
carles.cane@imb‐cnm.csic.es
enric.cabruja@imb‐cnm.csic.es
luis.fonseca@imb‐cnm.csic.es
teresa.gonzalez@imb‐cnm.csic.es
miguel.zabala@imb‐cnm.csic.es