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ICTS: Sala Blanca Integrada de Micro y Nano Fabricación SBCNM-CSIC CNM‐CSIC: National Microelectronics Center MINISTERIO DE ECONOMIA Y COMPETITIVIDAD D+T Microelectrónica, A.I.E. SPANISH COUNCIL FOR SCIENTIFIC RESEARCH (CSIC) NATIONAL MICROELECTRONICS CENTER (CNM) MICROELECTRONICS INSTITUTE OF BARCELONA (IMB) MICROELECTRONICS INSTITUTE OF MADRID (IMM) LARGE SCALE FACILITY Compound semiconductors (Integrated Clean Room) Silicon‐based micro and nano systems MICROELECTRONICS INSTITUTE OF SEVILLA (IMSE) Analog and mixed IC design ICTS Integrated Micro and Nano Fabrication Clean Room Main Clean Room • 1,500 m2 Class 100‐10,000 • CMOS integrated circuits • Microsystems technologies • Nanolithography and nanofabrication Back‐end Clean Room • 40 m2 Class 1000 • Chip packaging • High Density FlipChip ” ICTS Access Program GICSERV Call Deadline • Spanish Large Scale Facility since 1994 / EU access program as LSF (2000-2003) 1 May 2006 2/3 Jan/Oct 2007 • Current Spanish access to large facilities program since 2005 4 Mar 2008 51 5 Feb 2009 52 6 Feb 2010 55 7 Feb 2011 44 • Free access to (limited complexity) projects at the facility, approved by external evaluation committee • Open to EU + assoc., extended to Latin-American countries in 2010 Nº Projects 18 31/5 TOTAL 4/14 256 M&NT, MST, MEMS, NEMS… What are they? Microelectronics Fundamentals: The material Second element of crust of the Earth after oxygen Silicon does not exist free Normally in form of SiO2 6/14 Microelectronics Fundamentals: The technology. From the chip… to an instrument Component or subsystem wafer device portable benchtop Micro and Nano Integration Miniaturised and cost‐effective instruments Importance of the Micro and Nano Technologies for Europe • Recent adoption of the European Strategy on Micro and Nanotechnologies, within the Digital Agenda of the EC. • The EC adopts the Key Eanbling Techologies (KET) concept • The R&D Infrastructures are basic for Bridging the Valley of Death Micro and Nano Technologies: Enabling for Societal Challenges Health & wellness Energy & environment From ENIAC SRA: Transport & mobility Communication 9/14 Security & safety Infotainment e-society The Multiplier Effect of the Micro and Nanotechnologies Services Electronics 6000 B $* 1400 B $ Semiconductors 300 B $ Telecom, Internet, Broadcast, AAL,… Consumer, Medical, Energy, Transport, Security, Space,… Cornestone of High Tech economy Source: Future Horizon: IFS (2012 estimated*) Advantages of Miniaturisation • Portability: Small dimensions, Low weight • Low cost: Planar technologies, Batch production • Autonomy: Low power • Ubiquity • Reliability • Smartness 11/14 NanoTechnology: A crossroad Scale limit mastered by technology Stone Wood Iron Silicon Nano size: be closer to the biological media to improve specs Biocomplicity: Tissues Cells Genes Proteins DNA CNT Cells APM Atoms Micro and Nano Technologies embedded in our lifes 13/14 ICTS SBCNM Main Pillars & R&D Activity • Semiconductor Devices • Power Devices R&D • Integrated Circuits and Systems • Sensors, Actuators and MEMS Technology Transfer Training • Nanoscale Devices and Actuators • Lab‐on a chip, Polymer devices R&D Value Chain at SBCNM product idea IMB‐CNM Research Focus MICRO & NANO INTEGRATED SYSTEMS Energy Bio Key Enabling technologies Participation in the ATLAS detector at CERN Sensors and Circuits: Accelerometer with self‐test system Optomechanical sensors On‐chip immunodiagnostic methods for bacterial detection Sensor needles for organ monitoring for transplantation Direct methanol micro fuel cell (SU‐8 polymer) Integrated Circuits and Systems • Low‐power RF circuits for wireless sensors • Remote‐powered and body‐implantable systems • SoC & System electronics based on flexible platforms RF integrated circuit ARM – SoC based platform 1.1V 300μW Analog hearing‐aids Implantable systems for neural recording/stimulation Power modules integration and test Nanoscale devices • Advanced nanofabrication methods • Novel nanometrology tools • Singular properties of nanostructures • Ultimate performance of nanoscale devices CMOS‐integrated nanomechanical mass sensor Large‐scale fabrication of CNT transistors SFM control unit Pie zo Driving signal at fres (2nd mode) bimorph Lock-in 1 Lock-in 2 Modulation signal at fmod (1st mode) CNT resonator Si nanowires Topography Vibration amplitude RF source with amplitude modulation at fmod=f (1st eigenmode) CNT resonator : La importancia del Factor de escala Cuando se reducen las dimensiones: las relaciones L/S y S/V aumentan las estructuras térmicas se calientan y se enfrían más rápido las estructuras se calientan con menos energía las estructuras padecen menos estreses térmicos las estructuras tienen menos inercia mecánica la difusión en un fluido es más rápida la mezcla en los microcanales es más difícil el efecto de tensión superficial crece El consumo energético es distinto … 20/14 Spin‐Off Micro4Ener Wind Waves, tides, … Entrepreneurs Fund Award MICRO4ENER: Microsystems for the detection of microorganismos Otros Casos de Éxito (I) Otros Casos de Éxito (II) Otros Casos de Éxito (III) Otros Casos de Éxito (IV) Otros Casos de Éxito (VI) Productos en pequeñas series (I) Productos en pequeñas series (II) Conclusiones: • Qué pueden aportar las ICTS a la Industria ?: • Investigación aplicada de calidad • Realización de demostradores antes del paso a prototipado y de pre‐series • Fabricación de pequeñas series en casos especiales • Diseño interno y fabricación en Foundries externas, manteniendo la IP • Facilidad de participación en grandes consorcios tecnológicos • Formación en Alta Tecnología • Alquiler de m2 de Sala limpia • Asesoría para la instalación de Salas Blancas propias Thanks for your attention! +34 93 594 77 00 Carles Cané Enric Cabruja Luis Fonseca Teresa González Miguel Zabala IMB‐CNM Director IMB‐CNM Deputy Director IMB‐CNM Deputy Director IMB‐CNM Administrative Manager ICTS Manager carles.cane@imb‐cnm.csic.es enric.cabruja@imb‐cnm.csic.es luis.fonseca@imb‐cnm.csic.es teresa.gonzalez@imb‐cnm.csic.es miguel.zabala@imb‐cnm.csic.es